A novel FMEA tool application in semiconductor manufacture

摘要

In this Paper, we introduce a novel FMEA (Failure Mode and effect Analysis) system, It can achieve FMEA more practicable and valuable compared with current FMEA application status as record archives. The novel FMEA basic unit is module and related modules are combined to form a whole FMEA, Six new link/experience function modules are introduced into the standard FMEA format to integrate the database, and the module unit exists independently so that different FMEA file cross share the similar failure modules. Three new link function modules can connect FMEA system with other related production systems to embed FMEA useful resource into production as guidance, this link function can prevent potential and old failure modes timely occurring timely, further reduce defect and improve production efficiency and quality. This novel FMEA tool can make FMEA more value and important functions in semiconductor process.