A Mems Micro-Tweezers for Precision Micro Fabricating and Assembly

摘要

This paper presents the fabrication and characterization of a MEMS micro-tweezers system based on precise welding. It can be used in picking and placing a variety of micro parts such as MEMS devices and solder particles. The gap between the tips of micro-tweezers is 500um and the width of the cantilever is 100um. A micro-box fabricated by welding is used to control the closing and opening of the tweezers. The closing force of the tips can achieve 200mN, and by changing the size of the tips and the actuating distance, the closing force can be well controlled. The micro-tweezers can be used manually or installed in the micro-manipulation systems to make the experiment process easy to operate and more precise.