A precision robot system with modular actuators and MEMS micro gripper for micro system assembly

摘要

A robotic system which consists of a precision manipulator and a micro gripper for a micro system assembly is presented. The developed P-R-R type 3 DOF robot is actuated by newly proposed modular revolute and prismatic actuators. As an end-effector of this manipulator, a micro gripper is designed and fabricated with MEMS technology, and the displacement of the jaw is up to 142.8 μm. A real gripping test is conducted to evaluate the robotic system.