A computation of partially coherent imaging illuminated by apolarized source via the stack pupil shift matrix approach

摘要

×We report a computation of the partially coherent imaging with a polarized illumination using an improved SVDalgorithm applied to the stack pupil shift matrix computation method. The case of a polarized source is taken intoaccount by directly stacking the x-, y- and z-direction stack pupil shift operator. The polarization of the source isdescribed with a 22 coherency matrix which is decomposed into two independent polarization modes with certainweights determined by the polarization. For each of the polarization, we compute the stack pupil shift function in each ofthe x-, y- and z-direction. For a fast computation the aerial image, the SVD algorithm is applied to each of the polarizeddirectional kernel. In this way, the total complexity of the SVD computation is reduced. To compute the full maskimage, we compute the sum of convolution of the eigenvectors of each of the kernels and a 2D mask. For a fast decayingspectrum of the stack pupil shift matrix, we make the truncation of the sum with an estimate of the global precision. In atest with an annular source, we design a mask pattern. The result in the zero polarization case of our computation agreeswith that of a computation with the Prolith® simulator.© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.