Ultrahigh 22-nm resolution EUV coherent diffraction imaging using a tabletop 13-nm high harmonic source

摘要

We implement coherent diffractive imaging (CDI) using a phase-matched high-harmonic generation (HHG) sourceat 13 nm, demonstrating reconstructed images with a record 22 nm resolution for any tabletop, light-basedmicroscope. We also demonstrate the first r