The design and finite element analysis of a compliant 3-DOF spatial translational ultra-precise positioning platform

摘要

Ultra-precise positioning platform plays a significant role in ultra-precise operation and micro-operation. A new compliant 3-DOF spatial translational ultra-precise positioning platform is proposed and it overcomes the shortcomings of the general conventional drive and transmission such as low speed of response and low displacement resolution. The platform is consist of flexible hinges which provide elastic supporting, and with piezoelectric actuatorsas its drives which has high stiffness, high speed of dynamic response, high kinematic accuracy and high resolution. The end effector of the platform come to spatial ultra-presice positioning after it drived by the compliant parallel links which drived by piezoelectric actuators. The finite element analysis shows it can reach to positioning. accuracy in nanoscale.