Application of spectrophotometry and ellipsometry for determination of optical parameters of optical coating thin films

机译：分光光度法和椭圆光度法在测定光学涂层薄膜光学参数中的应用

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

In the present work usefulness of spectrophotometry and ellipsometry for the determination of different parameters of optical thin films have been discussed. The principles of their operation and some exemplary results for TiO2 thin films deposited by magnetron sputtering are presented.

机译：在本工作中，已经讨论了分光光度法和椭圆光度法对确定光学薄膜的不同参数的有用性。给出了它们的工作原理以及通过磁控溅射沉积的TiO 2 薄膜的一些示例性结果。

著录项

来源
《Proceedings of 2010 IEEE International Students and Young Scientists Workshop》|2010年|p.10-13|共4页
会议地点
作者

展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类光电子技术、激光技术;
关键词

相似文献

外文文献
中文文献
专利

1. Application of in situ ellipsometry in the fabrication of thin-film optical coatings on semiconductors [J] . Marcel G. Boudreau, Steven G. Wallace, Ginutis Balcaitis Applied optics . 2000,第6期

机译：原位椭偏仪在半导体薄膜光学涂层制备中的应用
2. Optical constants of DC sputtering derived ITO, TiO 2 and TiO 2:Nb thin films characterized by spectrophotometry and spectroscopic ellipsometry for optoelectronic devices [J] . Mohammed Rasheed, Régis Barillé Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites . 2017,第期

机译：DC溅射光学常数衍生的ITO，TiO 2 和TIO 2 ：表征NB薄膜通过分光光度法和光电器件的光谱椭偏测量
3. Determination of optical parameters of colloidal TiO_2 nanocrystals-based thin films by using surface plasmon resonance measurments for sensing applications [J] . M.G. Manera, G. Leo, M.L. Curri, Sensors and Actuators. B, Chemical . 2006,第1期

机译：表面等离子体共振测量在传感应用中确定胶体TiO_2纳米晶体基薄膜的光学参数
4. Application of spectrophotometry and ellipsometry for determination of optical parameters of optical coating thin films [C] . {missing} International Students and Young Scientists Workshop "Photonics and Microsystems" . 2010

机译：分光光度法和椭圆形测定法测定光学涂层薄膜光学参数的应用
5. Spectroscopic Ellipsometry as a Versatile, Non-Contact Probe of Optical, Electrical, and Structural Properties in Thin Films: Applications in Photovoltaics [D] . Junda, Maxwell M. 2017

机译：光谱椭偏仪作为薄膜中光学，电学和结构特性的多功能，非接触式探针：在光伏中的应用
6. Optical Properties of Thin Films on Transparent Surfaces by Ellipsometry; Internal Reflection for Film Covered Surfaces Near the Critical Angle [O] . Elio Passaglia, Robert R. Stromberg 1964

机译：椭圆偏振法在透明表面上薄膜的光学性质;接近临界角的覆膜表面的内部反射
7. Optical constants of DC sputtering derived ITO, TiO2 and TiO2:Nb thin films characterized by spectrophotometry and spectroscopic ellipsometry for optoelectronic devices [O] . Rasheed, Mohammed, Barille, Regis 2017

机译：直流溅射的光学常数来源于ITO，TiO2和TiO2：Nb薄用分光光度法和光谱椭偏仪测定的薄膜光电器件
8. Determination of the Optical Properties of Organic Thin Films by Spectroscopic Ellipsometry. [R] . Sward, M. L. 1990

机译：光谱椭偏法测定有机薄膜的光学性质。

Application of spectrophotometry and ellipsometry for determination of optical parameters of optical coating thin films

摘要

著录项

相似文献

相关主题

期刊订阅