High performance transparent photosensor array utilizing triple oxide semiconductor (HIZO-IZO-HIZO) thin film transistor

摘要

We proposed a novel photo sensor architecture utilizing transparent amorphous oxide TFT as both switching and sensor elements. The optimized triple layered TFT reveals negligible Vth, and photo current distributions with various device dimensions and aging time, which provides the solution to a workable transparent oxide sensor in terms of manufacturability and scalability. In addition, the operation principle of an oxide sensor TFT proposed in this paper allows for us to realize high performance (>150Hz) sensor array.