Preparation of VO2 microbolometer for CO2 gas detection

摘要

The VO2 microbolometer has been prepared by micro electrical mechanical system (MEMS) bulk-silicon process for the application of infrared gas detection. The characteristic of the prepared microbolometer is tested. The experiments are carried out for detecting CO2 gas concentration using the VO2 microbolometer as detector. The results show that the responsibility is ~18.1kV/W, the detectivity is about 1.37×108cmHz1/2/W, and the thermal time constant is ~72.4ms. The gas sensing results shows that the prepared microbolometer can be used for CO2 gas sensing.