Six-DOF maglev nano precision microstage development

摘要

Nanometer precision micromotion stage is a critical instrument for nanotechnology and is widely applied in semiconductor lithography and modern microfabrication machines. This paper focuses on the latest development of six-degree-of-freedom (six-DOF) magnetic levitation nanometer precision microstage and its actuating and bearing technology. Compared with the traditional stage, the maglev microstage has simple structure and better dynamic performance. As without friction, deformation and vibration problems, the six-DOF maglev microstage will be further applied and explored in nanometer precision motion systems.