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ON THE DETERMINATION OF ETCHING (OR GROWTH) RATES OF SINGLE CRYSTALS

机译:关于单晶蚀刻(或生长)速率的测定

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If we define the slowness curve by the normal vector of the material point of the crystal surface divided by the growth (or etching) rate of that point. Frank's theorem states that, in the course of crystal's growing or etching, each point of the boundary surface moves along its own straight line (or the characteristic line) which is parallel to the normal of the slowness curve. Since he didn't find out the speed of the crystal surface point advancing along this characteristic, the etched crystal shape can not be determined quantitatively. In this paper we derive the equation in explicit form expressing the surface moving speed along the characteristics in terms of the microscopic parameters (in atomic size) and variables such as step density, step flux, and step height. Not all the microscopic variables are measurable, so we have to drive certain equations relating the microscopic variables to the macroscopic ones (such as the orientations of the crystal boundary lattice plane, slopes of the characteristic lines, etching rates, and so on) through the kinematics theory of particles. One measurement of the macroscopic variables at any particular instant is enough to determine not only the etching (or growth) rates of the crystal but also the etched crystal shape of any subsequent instant.
机译:如果我们用晶体表面材料点的法线向量除以该点的生长(或蚀刻)速率来定义慢度曲线。弗兰克定理指出,在晶体生长或蚀刻的过程中,边界表面的每个点都沿其自身的直线(或特征线)移动,该直线平行于慢度曲线的法线。由于他没有发现沿该特性前进的晶体表面点的速度,因此无法定量确定蚀刻后的晶体形状。在本文中,我们以显式形式导出方程式,该方程式根据微观参数(原子尺寸)和变量(例如阶跃密度,阶跃通量和阶跃高度)表达沿特征的表面移动速度。并非所有的微观变量都是可测量的,因此我们必须驱动某些方程将微观变量与宏观变量相关联(例如,晶界晶格面的方向,特征线的斜率,蚀刻速率等)。粒子运动学理论。在任何特定瞬间对宏观变量进行的一种测量不仅足以确定晶体的蚀刻(或生长)速率,而且还能够确定任何后续瞬间的蚀刻晶体形状。

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