DESIGN AND FABRICATION OF LOW-VOLTAGE TWISTING-TYPE THERMAL ACTUATORS FOR MICROMIRRORS

摘要

A twisting-type micromirror that can be driven by two thermal bimorph actuators bending in opposite directions is designed from electro-thermo-mechanical theories and fabricated through a simple MEMS process. Each actuator consists of SiO_2 and gold thin-film layers. A simplified analytical model has been built to optimize the performance of micromirrors. Operation of the actuation system agrees well with predictions from theoretical models and simulations using a commercial code.