INVESTIGATION OF THERMAL NEUTRON INDUCED SOFT ERROR RATES IN COMMERCIAL SRAMS WITH 0.35 μM TO 90 NM TECHNOLOGIES

摘要

Measurement of soft error rates (SER) of ten commercial SRAMs of 0.35 μM to 90 nm technologies have been completed at the Institut Laue-Langevin (ILL) neutron facility. Results establish the sensitivity of old and recent SRAM technologies showing the impact of 10{sup left}B concentrations in BPSG and p-type regions. 10{sup left}B results are also compared to high-energy neutron SER.