Research on low frequency miniature vector hydrophone technology based on MEMS technology

摘要

In this paper, the MEMS technique is implemented in the design and manufacture of vector hydrophone. The micromechanical structure design technique, working principle and workmanship of sensing chip in vector hydrophone are introduced. A model of double cantilever beam structure is analyzed. Based on the theoretical work, a three dimensional vector hydrophone is manufactured, and the acoustical performance of it is also tested.