Electroacoustic performance of high frequency PZT based transducer fabricated by electrophoretic deposition: comparison with screen printing technique

摘要

The goal of this work is to compare the functional properties of piezoelectric PZT thick films fabricated by electrophoretic deposition process with those of films obtained by screen printing technique. Thick film fabrication, structural and electromechanical characterizations are reported. The density of the film is 82% of the theoretical density and coupling coefficient is 47%. The simulations of the electroacoustic performance of a 40 MHz integrated ultrasonic transducer shows that such fabrication process lead to transducer performance suitable for high resolution medical imaging.