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Comparison of 1D and 2D Theories of Thermoelastic Damping in Flexural Microresonators

机译:弯曲微谐振器中一维和二维热弹性阻尼理论的比较

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Thermoelastic damping (TED) represents the lower limit of material damping in flexural mode micro- and nanoresonators. Current predictive models of TED calculate damping due to thermoelastic temperature gradients along the beam thickness only. In this work, we develop a two dimensional (2D) model by considering temperature gradients along the thickness and the length of the beam. The Green's function approach is used to solve the coupled heat conduction equation in one and two dimensions. In the 1D model, curvature information is lost and, hence, the effects of structural boundary conditions and mode shapes on TED are not captured. In contrast, the 2D model retains curvature information in the expression for TED and can account for beam end conditions and higher order modes. The differences between the 1D and 2D models are systematically explored over a range of beam aspect ratios, frequencies, boundary conditions, and flexural mode shapes.
机译:热弹性阻尼(TED)代表弯曲模式微谐振器和纳米谐振器中材料阻尼的下限。 TED的当前预测模型仅根据沿梁厚度的热弹性温度梯度来计算阻尼。在这项工作中,我们通过考虑沿梁的厚度和长度的温度梯度来开发二维(2D)模型。格林函数方法用于一维和二维求解耦合热传导方程。在一维模型中,曲率信息会丢失,因此不会捕获结构边界条件和振型对TED的影响。相反,2D模型在TED表达式中保留曲率信息,并可以说明光束结束条件和高阶模式。在一系列的光束纵横比,频率,边界条件和弯曲模式形状上,系统地探索了1D模型和2D模型之间的差异。

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