Testing of MEMS-based microsystems

摘要

The introduction of MEMS in microsystems is progressing rapidly. The high-volume testing of these multi-domain systems are often relatively cumbersome in comparison with pure electrical tests, because of non-electrical stimuli and/or response. It requires currently custom-made test set-up. Also the quality of tests is difficult to quantify. Hence, structural tests seem more appropriate, but this requires a lot of research and new approaches.