Lead zirconate titanate (PZT) films were produced onstainless steel substrate by the aerosol depositionmethod (ADM) using a PZT submicron-size particlebeam. In the ADM, when the PZT submicron-sizeparticles impact with the substrate, the particles form afilm. To modify their primary ferroelectrics properties,the films were irradiated with a diode laser. When thescanning velocity of the laser spot on the films weredecreased from 6 mm/s to 1 mm/s, laser intensity wasincreased from 110 W/cm2 to 670 W/cm2. Dielectricconstant and the value of remanent polarization wereimproved by the laser irradiation. When theimprovements of the properties were performed, thesubstrates were not damaged.
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机译：钛酸锆钛酸铅（PZT）膜是在
不锈钢基材通过气溶胶沉积
PZT亚微米级颗粒的合成方法（ADM）
光束。在ADM中，当PZT为亚微米尺寸时
颗粒与基材碰撞，颗粒形成
电影。要修改其主要铁电特性，
薄膜用二极管激光器照射。当。。。的时候
薄膜上激光点的扫描速度为
从6 mm / s降至1 mm / s，激光强度为
从110 W / cm2增加到670 W / cm2。电介质
常数和剩余极化值分别为
通过激光辐照得到改善。当。。。的时候
进行了性能改进，
基材没有损坏。
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