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Materials and processes issues in fine pitch eutectic solder flip chip interconnection

机译:小间距共晶焊料倒装芯片互连中的材料和工艺问题

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New product designs within the electronics packaging industry continue to demand interconnects at microscopic geometry, both at the integrated circuit (IC) and supporting board level, thereby creating numerous manufacturing challenges. Flip chip on board (FCOB) applications are currently being driven by competitive manufacturing costs and the need for higher volume and robust production capabilities. One of today's low cost FCOB solutions has emerged as an extension of the existing infrastructure for surface mount technology (SMT) and combines an under bump metallisation (UBM) with a stencil printing solder bumping process, to generate mechanically robust joint structures with low electrical resistance between chip and board. Although electroless Ni plating of the UBM, and stencil printing for solder paste deposition, have been widely used in commercial industrial applications, there still exists a number of technical issues related to these materials and processes as the joint geometry is further reduced. This paper reports on trials with electroless Ni plating and stencil paste printing and the correlation between process variables in the formation of bumps and the shear strength of such bumps at different geometries. The effect of precise control of the tolerances of squeegees, stencils and wafer fixtures was examined to enable the optimisation of the materials, processes and tooling for reduction of bumping defects.
机译:电子封装行业中的新产品设计继续要求在微观几何结构上进行互连,既要在集成电路(IC)上又要在支撑板一级上进行互连,从而带来了许多制造挑战。竞争激烈的制造成本以及对更大数量和更强大生产能力的需求,正在推动倒装板上芯片(FCOB)应用的发展。当今低成本的FCOB解决方案之一已成为现有表面贴装技术(SMT)基础结构的扩展,并将凸点下金属化(UBM)与模版印刷焊料凸点工艺相结合,以生成具有低电阻的机械坚固的接头结构在芯片和电路板之间。尽管UBM的化学镀镍和用于焊膏沉积的模版印刷已广泛用于商业工业应用,但是随着接头几何形状的进一步减小,仍然存在与这些材料和工艺有关的许多技术问题。本文报道了化学镀镍和模版糊印刷的试验,以及凸点形成过程变量与这些凸点在不同几何形状下的剪切强度之间的相关性。考察了精确控制刮刀,模版和晶圆夹具的公差的效果,以优化材料,工艺和工具以减少凸块缺陷。

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