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Materials and processes issues in fine pitch eutectic solder flip chip interconnection

机译:精细间距共晶焊料倒装芯片互连中的材料和过程问题

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New product designs within the electronics packaging industry continue to demand interconnects at microscopic geometry, both at the integrated circuit (IC) and supporting board level, thereby creating numerous manufacturing challenges. Flip chip on board (FCOB) applications are currently being driven by competitive manufacturing costs and the need for higher volume and robust production capabilities. One of today's low cost FCOB solutions has emerged as an extension of the existing infrastructure for surface mount technology (SMT) and combines an under bump metallisation (UBM) with a stencil printing solder bumping process, to generate mechanically robust joint structures with low electrical resistance between chip and board. Although electroless Ni plating of the UBM, and stencil printing for solder paste deposition, have been widely used in commercial industrial applications, there still exists a number of technical issues related to these materials and processes as the joint geometry is further reduced. This paper reports on trials with electroless Ni plating and stencil paste printing and the correlation between process variables in the formation of bumps and the shear strength of such bumps at different geometries. The effect of precise control of the tolerances of squeegees, stencils and wafer fixtures was examined to enable the optimisation of the materials, processes and tooling for reduction of bumping defects.
机译:电子包装行业内的新产品设计继续在集成电路(IC)和支撑板级的微观几何形状中互连,从而产生众多制造挑战。载板上的倒装芯片(FCOB)应用目前正在通过竞争性制造成本和更高批量和强大的生产能力的需求驱动。今天的低成本FCOB解决方案之一已成为表面贴装技术(SMT)现有基础设施的延伸,并将凸块金属化(UBM)与模版印刷焊料凸块工艺相结合,以产生具有低电阻的机械鲁棒的关节结构芯片和板之间。虽然UBM的无电镀Ni电镀和用于焊膏沉积的模版印刷,但已广泛用于商业工业应用中,仍然存在与这些材料相关的许多技术问题,并且随着关节几何形状进一步降低。本文报告了用电镀Ni电镀和模板糊印刷的试验以及在不同几何形状形成凸块和这种凸块的剪切强度之间的过程变量之间的相关性。检查了精确控制刮板,模板和晶片固定装置的公差的效果,以使得能够优化材料,工艺和工具,以减少凸起缺陷。

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