MEMS/NEMS Dynamics Measurement Tool Using The Stroboscopic Principle

摘要

High resolution and noncontacted measurement tools for the dynamic characterization of micro devices are necessary to develop high performance/precision and reliable microelectromechanical systems (MEMS). In this paper, a three-dimensional dynamic measurement system based on stroboscopic and interferometric methods is presented. This system can capture bright-fielded and interferometric images at the same time and will not have any phase error when constructing three-dimensional solid-models. The accuracy of in-plane motion measurement using this system has been calibrated by using piezoelectric nano-platform. The measurement of in-plane motions of the comb-drive actuator using this developed tool have been demonstrated.