首页>
外国专利>
MEMS AND/OR NEMS PRESSURE SENSOR WITH IMPROVED PERFORMANCES AND DYNAMIC MICROPHONE WITH SUCH A SENSOR.
MEMS AND/OR NEMS PRESSURE SENSOR WITH IMPROVED PERFORMANCES AND DYNAMIC MICROPHONE WITH SUCH A SENSOR.
展开▼
机译:具有改进性能的MEMS和/或NEMS压力传感器以及带有此类传感器的动态麦克风。
展开▼
页面导航
摘要
著录项
相似文献
摘要
Dynamic pressure sensor of MEMS and/or NEMS type comprising a support and a rigid sensitive element anchored to the support by at least one anchoring zone, said sensitive element comprising a parallel first and a second face intended to be subjected to different pressures, said sensitive element being capable of having an out-of-plane displacement with respect to the support in a detection direction under the effect of a pressure difference, the pressure sensor also comprising a detector of a force applied to the sensitive element by the pressure difference.
展开▼