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MEMS AND/OR NEMS DYNAMIC PRESSURE SENSOR WITH IMPROVED PERFORMANCES AND MICROPHONE COMPRISING SUCH A SENSOR
MEMS AND/OR NEMS DYNAMIC PRESSURE SENSOR WITH IMPROVED PERFORMANCES AND MICROPHONE COMPRISING SUCH A SENSOR
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机译:MEMS和/或NEMS动态压力传感器,其性能得到改善,并且麦克风具有此类传感器
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摘要
Dynamic pressure sensor of MEMS and/or NEMS type comprising a support and a rigid sensitive element anchored to the support by at least one anchoring zone, said sensitive element comprising a parallel first and a second face intended to be subjected to different pressures, said sensitive element being capable of having an out-of-plane displacement with respect to the support in a detection direction under the effect of a pressure difference, the pressure sensor also comprising a detector of a force applied to the sensitive element by the pressure difference.
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