Thermal distribution during destructive pulses in ESD protection devices using a single-shot, two-dimensional interferometric method

摘要

Thermal distribution during single destructive electrostatic discharge (ESD) events is investigated in smart power ESD protection devices using a novel two-dimensional holographic interferometry technique. The hot spot dynamics and position of destructive current filaments is correlated with the thermal distribution under the non-destructive conditions and with the failure analysis results.