Electrical anf Fluidic Packaging of Surface Micromachined Electro-Microfluidic Devices

摘要

Microfluidic devices have applications in chemical analysis, biomedical devices and ink-jets. An integrated microfluidic system incorporated electrical signals on-chip. Such electro-microfulidic devices require fluidic and electrical connection to larger packages. Therefore electrical and fluidic packaging of electro-microfluidic devices is key to the development of integrated microfluidic system. Packaging is more challenging for surface micromachined sevices than for larger bulk micromachiend devices. However, because surface micromachining allows incorporation of electrical traces during microfluidic channel fabrication, a monolithic device results.