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Investigation of molybdenum contamination in /sup 11/B/sup +/ and /sup 31/P/sup +/ implants

机译：/ sup 11 / B / sup + /和/ sup 31 / P / sup + /植入物中的钼污染调查

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《Ion Implantation Technology, 2000. Conference on》|2000年|P.711-714|共4页
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Funk; K.; Haublein; V.;
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中图分类无线电电子学、电信技术;
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