A novel, aerosol-nanocrystal floating-gate device for non-volatile memory applications

摘要

This paper describes the fabrication, and structural and electrical characterization of a new, aerosol-nanocrystal floating-gate FET, aimed at non-volatile memory (NVM) applications. This aerosol-nanocrystal NVM device features program/erase characteristics comparable to conventional stacked gate NVM devices, excellent endurance (<10/sup 5/ P/E cycles), and long-term non-volatility in spite of a thin bottom oxide (55-60 /spl Aring/). In addition, a very simple fabrication process makes this aerosol-nanocrystal NVM device a potential candidate for low cost NVM applications.