Comparative investigations of the bolometric properties of thin film structures based on vanadium dioxide and amorphous hydrated silicon

摘要

Abstract: A choice of sensitive element material for uncooled microbolometric array dependents on the ultimate array parameters to a great extent. This paper presents the results of studies of sandwich and planar bolometric structures based on aSi:H and VO$-2$/ films accordingly. The aSi:H films were fabricated by plasmachemical vapor-phase deposition and VO$-2$/ films were prepared by reactive magnetron ion-plasma sputtering. Sandwich structures with area 100 $MUL 100 $mu@m have a resistance of 20 k approximately ega and temperature coefficient of resistance (TCR) of $APEQ 2%/K at 25$DGR@C. Planar structures with operating section dimensions of 100 $MUL 70 $mu@m have TCR of 2.9%/K at the same resistance. The methods of contact noise reduction are found for both type structures. Sandwiches constructed to act as an optical cavity absorb 80% of radiation at 8 $mu@m wavelength. It is shown that the planar structures absorption of 50 - 80% can be reached in the 8.5 - 10 $mu@m band.!12