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Anisotropic Artifacts Introduced by Horizontal Scanning Instruments in Surface Metrology

机译:平面计量中水平扫描仪引入的各向异性伪像

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1. The complexity - SRC space can be used to differentiate sensor orientation, tracing direction and analysis direction on the same surface. 2. Anisotropic characteristics with respect to complexity are apparent, only when the orientation of the sensor is controlled. 3. Analyses perpendicular to the tracing direction results in a greater scatter in the complexity of the measurements. 4. Analysis in the tracing direction results in a greater smooth-rough crossover. 5. Artifacts are imparted both by the orientation of the triangulation laser sensor and by the scanning and tracing tables or some noise which varies with time.
机译:1.复杂性 - SRC空间可用于区分在同一表面上的传感器方向,追踪方向和分析方向。 2.仅当传感器的方向控制时,相对于复杂性的各向异性特性是显而易见的。 3.垂直于追踪方向的分析导致测量的复杂性散布。在跟踪方向上的分析导致更大的光滑粗糙的交叉。 5.伪影通过三角测量激光传感器的方向和扫描和追踪表或随时间变化而变化的一些噪声来赋予伪影。

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