Iron-Silicate Glassy Films by Sol-Gel Conversion Induced by Rapid Thermal Processing

摘要

The sol-gel system iron triethoxide - tetraethylorthosilicate (TEOS) with the Fe/Si atomic ratio ranging from 0 to 1 has been investigated. Our study leads to the conclusion that the annealing method of the hydrolyzed precursor film determiens the type of solid film formed. Annealign by Rapid Thermal Processign (RTP) with its high heating and cooling rates yields amorphous, glassy iron silicate films. These films resutl from polycondensation reactions between Si_OH and Fe-OH groups of the hydrolyzed precursors forming Fe-O-Si and Si-O-Si bonds. These bonds show a characteristic vibration band in FTIR spectra, which is most intense for Fe/Si = 1, and shifts for increasign Fe/si ratio from 1073 down to 965 cm~-1.