Dual beam-mass structure gyroscope micromachined by deep RIE process

摘要

Described in this paper is a micromachined vibratory hyroscope fabricated by combining anisotropic etching and DRIE process. The gyro consistis of two chips, the sensor chip and the bottom chip. Two identical cantilever eam-mass structures are fabricated in the sensor chip and driving electrodes are made on the bottom chip. The beam-mass structure has two vibration moees: the vertical viration mode for driving and the lateral vibration mode for sensing. Piezoresistive sensing elements are made on the surface of the beams to monitor the vertical and the lateral vibration.