Fabrication of micro torsional actuator using surface plus bulk micromachining processes

摘要

A novel electrostatically driven torsional actuator is proposed in this paper. The torsional actuator is fabricated through the integration of surface and bulk micromachining processes. Thus the goal of fabricating a torsional actuator with a cavity right beneath the edge of the moving plate is reached. In addition, special design of the driving electrode is also available in this research. The advantage of the proposed design is to increase the traveling distance of the actuator as well as to increase the area of the moving plate. In short, the proposed design provides the possibility of increasing the size of moving plates without reducing its rotating angle. Therefore, the applications of the torsional actuator, such as image scanner and positioner, are widened.