Micromachined torsional mirror unit for optical switching and fabrication method therefor

摘要

An optical switch (402) formed on a substrate and a fabrication method therefor are disclosed. The optical switch (402) comprises a mirror (404) disposed substantially upright in relation to a substrate (414), the mirror (404) being rotatably displaceable about a pivot between a first position and a position angularly displaced from the first position. The optical switch also comprises a comb drive actuator, which includes a stationary comb (408) anchored to the substrate in a position substantially parallel to the plane of the substrate (414), and a displaceable comb (406) interleaved with the stationary comb (408) and coupled to the mirror (404) in a position substantially coplanar with the stationary comb (408) and substantially perpendicular to the plane of the mirror (404). In the optical switch (402), the stationary and displaceable combs (408, 406) are capable of applying a force for rotatably displacing the mirror (404) to one of the first position and position angularly displaced from the first position.