Electron traps at and near the surface of InGaAs treated with Ar plasma are investigated by isothermal capacitance transient spectroscopy measurements. Two electron traps are detected and designated as E1 and E2. The E1 and E2 traps are located at 0.35 eV and 0.48 eV below the conduction band edge, respectively. In the case when InGaAs is treated with PH/sub 3/-added Ar plasma, a significant reduction in the densities of both E1 and E2 traps occurs in comparison with those of Ar-plasma-treated InGaAs. It is found that phosphorus atoms are effective in suppressing generation of electron traps in InGaAs.
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机译:通过等温电容瞬态光谱测量研究了用Ar等离子体处理过的InGaAs表面及其附近的电子陷阱。检测到两个电子陷阱,分别命名为E1和E2。 E1和E2陷阱分别位于导带边缘以下0.35 eV和0.48 eV处。在用添加有PH / sub 3 /的Ar等离子体处理InGaAs的情况下,与经Ar等离子体处理的InGaAs相比,E1和E2阱的密度都显着降低。发现磷原子可有效地抑制InGaAs中电子陷阱的产生。
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