Role of material structure on molecular diffusion of hydrogen in a-Si:C:H films

摘要

We used Fourier Transform Infra-Red (FTIR) analysis of bi-layers of plasma-grown hydrogenated amorphous siicon-carbide films to investigate the role of the material structure in the hydrogen diffusion process.In the bi-layers one layer was deposited using CH_4/SiH_4 and in the other layer CD_4/SiD_4 was applied.The carbon concentration was 20 at.