We report on electroabsorption spectra for plasma deposited thin films of hydrogenated silicon ranging from amorphous (a-Si:H) to microcrystalline ( um c-Si:H) structures.The EA spectrum of a-Si:H deposited from silane with low hydrogen dilution were consistent with previous works; material prepared with high hydrogen dilution showed a 0.07 eV blue shift of the spectrum and somewhat stronger electroabsorption. um c-Si:H specimens have a sharp peak at 1.19 eV; the spectrum is blue shifted by 0.03 eV and is significantly sitronger than electroabsorption reported in single crystal silicon.Spectral features which have no correspondence to single crystal silicon were also obsrved in um c-Si:H. Specimens deposited using "cyclic" deposition and chemical annealing had electroabsorption spectra with both the 1.19 eV,crystalline feature and a band peaking at 2.02 eV which we attribute to strongly hydrogenated a-Si:H.We discuss applications of electroabsorption to determining the crystal fraction of microcrystalline mateiral and to determining grain size distributions.
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机译:我们报告了从非晶(A-Si:H)到微晶(UM C-Si:H)结构的氢化硅的等离子体沉积薄膜电吸收光谱。A-Si:H的EA光谱沉积从氢烷沉积低氢气稀释符合以前的作品;用高氢稀释制备的材料显示出光谱的0.07 EV蓝色偏移和稍微较强的电吸收。 UM C-Si:H标本在1.19 eV处具有尖峰;光谱是蓝色移位0.03eV,并且比单晶硅中报道的电吸收显着加入。在UM C-Si中也没有对应于单晶硅的相对应的光谱特征:H。使用“循环”沉积和化学退火沉积的试样具有电吸收光谱,其中1.19eV,晶体特征和2.02 eV的带峰值,我们将电气促进到强烈氢化的A-Si:H.We讨论电气吸附的应用以确定晶体级分微晶配对和测定晶粒尺寸分布的研究。
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