首页> 外文会议>Electronic Components and Technology Conference, 1997. Proceedings., 47th >Thermosonic flip-chip bonding using longitudinal ultrasonic vibration
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Thermosonic flip-chip bonding using longitudinal ultrasonic vibration

机译:使用纵向超声振动的热超声倒装芯片键合

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Flip-chip assembly is an important technology for first level electronic packaging. Among different assembly approaches, thermosonic bonding is becoming an attractive choice because it is cost-effective. To increase the bonding capability for high I/O assembly, a novel longitudinal bonding system is developed in this study. This bonding system has two advantages over the transverse bonding system: it overcomes the planarity problem and simplifies bonding tool configuration. During the development, an end-effector is designed with rigorous considerations of ultrasonic wave propagation, bonding force and co-planarity between the chip holder and hot stage. The bonding system is then characterized to make sure that it is suitable for flip-chip assembly. This bonding technology is proven successful by mechanical bonding tests as well as a functional CMOS/SRAM module demonstration. During the bonding process, the chip is under longitudinal ultrasonic "hammering". However, there is no apparent damage because the impact stress is low due to the low ultrasonic vibration amplitude.
机译:倒装芯片组装是用于一级电子封装的重要技术。在不同的组装方法中,热超声粘合正成为一种有吸引力的选择,因为它具有成本效益。为了提高高I / O组件的粘接能力,本研究开发了一种新型的纵向粘接系统。与横向粘合系统相比,该粘合系统具有两个优点:它克服了平面性问题并简化了粘合工具的配置。在开发过程中,设计了一个末端执行器,并严格考虑了超声波传播,芯片夹持器和高温工作台之间的键合力和共面性。然后对键合系统进行表征,以确保它适用于倒装芯片组装。通过机械键合测试以及功能性CMOS / SRAM模块演示,证明了该键合技术是成功的。在键合过程中,芯片会受到纵向超声波“锤击”。但是,由于超声波振动振幅低,因此冲击应力低,因此没有明显的损伤。

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