Integration of thin film electronics and MEMS

机译：薄膜电子与MEMS的集成

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Abstract: The integration of thin film electronics and opto-electronics with MEMs is discussed. Thin film electronics and opto-electronics based on amorphous silicon or polycrystalline silicon are considered for integration with MEMs devices based on piezoelectric thin films or on amorphous or poly-Si thin films.!23

机译：摘要：讨论了薄膜电子和光电与MEM的集成。考虑将基于非晶硅或多晶硅的薄膜电子设备和光电子与基于压电薄膜或非晶或多晶硅薄膜的MEMs器件集成！23

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《Smart Structures and Materials 1996: Smart Electronics and MEMS》|1996年|p.66-74|共9页
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Stephen J. Fonash; The Pennsylvania State Univ.; University Park; PA; USA.;
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中图分类电工技术;
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Integration of thin film electronics and MEMS

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