Batch-dissolved wafer process for low-cost sensor a

摘要

Abstract: As microsensor technology continues to grow and mature, the issues of cost and manufactureability become key issues in determining whether silicon transducer technologies are commercially viable. The dissolved wafer process is an attractive manufacturing technology for the production of low cost, high volume transducers. The process requires only 3 masking steps and the tooling for micromachining is inexpensive. Six sigma level yield is attainable and the turnaround time for a lot is 1.5-2 weeks for one work shift operation. This technology is currently being implemented in commercial production low cost inertial instruments. !9