Electromagnetic Analysis of MEMS-Based Tunable EBG Bandstop Filter Using RF MEMS Switch for Ku-Band Applications

摘要

This paper presents an electromagnetic analysis of EBG Bandstop filter integrated with RF MEMS switch. The transmission line theory in microwave technology is used to analyze the proposed structure by studying isolation parameter of the filter. A fixed-fixed switch with low pull-in voltage of 4.05 V is designed and integrated on the signal line which is equidistant from the two EBG structures of filter. The filter resonates at 14.05 GHz without integrating the switches and is shifted to 15.85 GHz due to upstate capacitance of 41.56 μF when integrated with the switch at on-state. The frequency is tuned to 15.27, 14.5 and 11.4 GHz by actuating the beam to displace about 1, 2 and 3 μm. The switch produces a downstate capacitance of 19.11 pF during offstate and tunes the resonant frequency to 11.4 GHz. Thus, the tuning of the proposed EBG Bandstop filter is achieved by using RF MEMS switches and is efficiently used for Ku-band applications. The proposed electromagnetic analysis is carried out using HFSS 13.0v FEM tool.