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Effect of Pocket Intrinsic Doping on Double and Triple Gate Tunnel Field Effect Transistors

机译:口袋本征掺杂对双栅和三栅隧道场效应晶体管的影响

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Band-to-band tunneling at the source-channel junction of multigate tunnel field effect transistors (TFETs) plays a major role to boost ON current for eliminating short channel effects (SCE). In this paper, the conventional double gate TFET structure (DG-TFET) is designed and modified by applying gate engineering to design triple gate TFET (TG-TFET). The work mainly focuses on drain current (Ion) assessment, fast switching ratio (I_(ON)/I_(OFF) and subthreshold swing (55) by comparing between conventional DG-TFET and proposed TG-TFET with pocket intrinsic layers. The variation of drain current for different pocket intrinsic doping conditions on TFET performance has been reviewed and demonstrated with SIL-VACO TCAD simulator. The pocket intrinsic triple gate TFET shows a higher Ion and better (I_(ON)/I_(OFF) ratio of 5.51 for source and pocket doping of 1 × 10~(20) cm~(_3) and 1 × 10~(15) cm~(-3). This provides 68.51 % fast switching ratio as compared to other non-conventional tunnel FETs. But the subthreshold swing (55) is limited by variation of pocket doping from 10~0 to 10~(18) cm~(_3) for TG-PI-TFET, since DG-PI-TFET provides better subthreshold swing of 23.93 mV/dec £60 mV/dec) considering the leakage current for low-power applications.
机译:在多栅极隧道场效应晶体管(TFET)的源极-沟道结处的带间隧穿起着主要作用,可提高导通电流以消除短沟道效应(SCE)。在本文中,常规的双栅极TFET结构(DG-TFET)是通过应用栅极工程设计三栅极TFET(TG-TFET)进行设计和修改的。通过比较传统的DG-TFET和建议的具有袋状本征层的TG-TFET,该工作主要集中在漏极电流(Ion)评估,快速开关比(I_(ON)/ I_(OFF)和亚阈值摆幅(55))上。 SIL-VACO TCAD仿真器对不同袋型本征掺杂条件下的漏极电流对TFET性能的影响进行了回顾和演示,袋型本征三栅极TFET表现出更高的离子和更好的(I_(ON)/ I_(OFF)比为5.51)。源和口袋掺杂分别为1×10〜(20)cm〜(_3)和1×10〜(15)cm〜(-3),与其他非常规隧道FET相比,提供了68.51%的快速开关比。对于TG-PI-TFET,亚阈值摆幅(55)受口袋掺杂从10〜0到10〜(18)cm〜(_3)的变化限制,因为DG-PI-TFET提供了更好的23.93 mV / dec的亚阈值摆幅(£60 mV / dec)考虑低功率应用的泄漏电流。

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