Modeling of multiple axis MEMS accelerometer: SPICE macro modeling for functional analysis

摘要

MEMS elements have been penetrating in each segment of life, ranging from gaming, smartphones to home automation. Design and implementation of complex MEMS has become tedious. The paper describes macro modeling of 3-axis accelerometer based on SPICE. The model was also compared to a commercially available digital accelerometer ADXL350. The mapping of this model was in functional adherence to chip mentioned above. In this paper we will develop macro model of accelerometer using PSpice. Modeling of accelerometer comprises of various blocks such as power management, 3-axis sensor, sense electronics, ADC, control and interrupt logic and serial I/O. This style of modeling enables us to embark on MEMS based system design having in depth knowledge of either electrical or mechanical design.