In this paper, an internal model-based tuning scheme of oscillation caused by underdamping characteristic of deflection mechanism in electromagnetic MEMS micro-mirrors. In this scheme, an approximated resonant compensator for suppressing the oscillation of micro-mirror is introduced. Then, an internal model-based tuning scheme with robust design is implemented to the angular tuning of electromagnetic micro-mirror. The experiments on an electromagnetically actuated micro-mirror are implemented for evaluation of the proposed tuning approach.
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