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Thermal shock reliability of GaN die-attached on DBA with Ag sinter paste

机译:银烧结膏固结在DBA上的GaN芯片的热冲击可靠性

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The reliability of GaN / DBA die-attached joint structure with hybrid Ag paste die-attach layer was evaluated in harsh thermal shock. For the joint structure, DBA and GaN chips metallized by Ti/Ag were firstly prepared. GaN die and DBA substrate was bonded at 250 °C without pressure in air sintering condition. The thermal cycles up to 1000 in a temperature range of −50 °C to 250 °C` were implemented for the joint structure. The initial average die shear strength of the GaN/DBA joint structure was about 33 MPa, but reduced after 500 cycles and further significantly reduced below 10 MPa after 1000 cycles. The microstructure was observed by FE-SEM with EDX. Different with Cu layer on the DBC substrate, Al is difficult to be oxidized during the thermal cycling. The decrease of shear strength was mainly attributed by the deformation of Al layer which leading to crack growth in the Ag sinter layer. In addition, this study also further discussed the effect of thermal shock on the microstructure of DBA substrate and Ag sinter paste during the thermal cycling.
机译:在严酷的热冲击下,评估了具有混合银浆芯片附着层的GaN / DBA芯片附着接头结构的可靠性。对于接头结构,首先制备了通过Ti / Ag金属化的DBA和GaN芯片。在空气烧结条件下,在无压力的情况下,将GaN管芯和DBA衬底在250°C的温度下粘合。对于关节结构,在−50°C至250°C`的温度范围内执行了高达1000次的热循环。 GaN / DBA接头结构的初始平均模具剪切强度约为33 MPa,但在500次循环后降低,在1000次循环后进一步明显降低至10 MPa以下。通过具有EDX的FE-SEM观察其微观结构。与DBC基板上的Cu层不同,Al在热循环过程中难以被氧化。剪切强度的下降主要归因于Al层的变形,从而导致Ag烧结层的裂纹扩展。此外,本研究还进一步讨论了在热循环过程中,热冲击对DBA基底和Ag烧结膏的微观结构的影响。

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