A Compact Terahertz Source Technology for Automotive Radar and Other Applications

摘要

This paper presents a compact, low power consumption and low cost resonant tunneling diode (RTD) based terahertz (THz) source technology for automotive radar applications. Large RTD sizes of 4×4 μm²are manufactured using the low cost photolithography technology with a total chip size of 470×530 μm². The measured oscillation frequency was 260 GHz and the oscillator exhibits a low power consumption of 200 mW and a record output power of 1 mW.