Structural Optimization Design of a High-precision Compact Position Sensitive Detector

摘要

The position sensitive detector (PSD) based on the transverse photoelectric effect is a non-segmented photoelectric device, which can measure the center of the gravity of the incident light energy. This paper introduces the basic principles of semiconductor optoelectronic PSD and the performance characteristics of two-dimensional PSD devices. At the same time, a new type of PSD structure is optimized designed. The position and angle of the beam can be measured at the same time. The experimental results show that the PSD can obtain the resolution of micro-meter and sub micro-rad. The precision of the angle of the PSD A is about one order of magnitude higher than that of the PSD chip.