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W-band passive load pull system for on-wafer characterization of high power density N-polar GaN devices based on output match and drive power requirements vs. gate width

机译:W波段无源负载牵引系统,用于根据输出匹配和驱动功率要求与栅极宽度的关系,对高功率密度N极性GaN器件进行晶圆上表征

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A W-band on-wafer passive load pull system constructed for the characterization of high power density N-polar GaN devices is presented. N-Polar GaN's large RF voltage swing enables high power densities but also increases the power match impedance which must be synthesized with the limited on-wafer tuning range. Increasing test cell gate width to decrease impedance increases the system's drive power requirement. The tradeoff between these is analyzed, showing that a passive load pull system can characterize a wide range of devices. This is demonstrated with measured data from an N-polar GaN device exhibiting 4.1 W/mm power density at 94 GHz.
机译:提出了一种用于表征高功率密度N极GaN器件的W波段晶圆上无源负载牵引系统。 N-Polar GaN的大RF电压摆幅可实现高功率密度,但同时也增加了功率匹配阻抗,必须在有限的晶圆上调谐范围内进行合成。增加测试单元的栅极宽度以减小阻抗会增加系统的驱动功率要求。分析了两者之间的权衡,表明无源负载牵引系统可以表征多种器件。这是由来自N极性GaN器件的测量数据证明的,该器件在94 GHz时的功率密度为4.1 W / mm。

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