Solid state pulsed power systems for plasma immersion ion implantation

摘要

Diversified Technologies, Inc. (DTI) has developed and patented solid state technology to provide fast, high power switches capable of both opening and closing. These switches are modular, and can be combined in series and/or in parallel to provide a wide range of voltage, current, and power handling capabilities for Plasma Immersion Ion Implantation (PIII).