Application of orthogonal experiment method of copper samples of small size in Energy Dispersive spectroscopy quantitative analysis

摘要

The results of small size copper sample tested by energy dispersive spectrometer were analyzed in the method of the orthogonal experiment. By the method of variance analysis to study the effects of the accelerating voltage, working distance, magnification times and collection time on the element content, we determined that the preferred experimental conditions were set at the accelerating voltage 20kv, collection time 90 seconds, working distance 11 mm, and magnification 1000 times. The results showed the impact of the acceleration voltage on results was the most significant. The influences of working distance and collection time were substantially the same. The influence of the magnification multiples was the minimum. The sample size and the height from samples to the sample stage also affected the element content. Under the above conditions, the sample of smaller size and the shorter distance from the sample surface to the sample stage affected the element content significantly.