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Application of Autosched AP Simulation Model in Wafer Fab

机译:Autosched AP仿真模型在晶圆FAB中的应用

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Wafer fabrication or "fab" simulation models are often used to assist the daily running of wafer production. Their main uses have been focused on testing production scenarios, to estimate cycle times, quote delivery times to customers, or test operational policies such as lot dispatching rules and material handling systems scheduling policies. Fab technologies sometimes stay in demand for as little as one year, after that wafer prices often drop rapidly. Based on this, many semiconductor manufacturers regard cycle time as the most important element and treat it as a monitored performance measure in wafer fabrication. One of the significant benefits of simulation modeling is the ability to conduct sensitivity ("What-If") analyses that allow us to experiment without disrupting the actual manufacturing operation. This paper will focus on and present the applications of the Autosched AP simulation software from Brooks Automation to provide ("What-If") analysis and a characteristic curve relating Cycle time to Fab Utilization. The paper will show how simulation is used as a modeling tool to assist a production manager's decision-making process in production planning and effectively evaluate the factory's performance capabilities. Analysis will describe the impact of different percentage of factory loading on the cycle time.
机译:晶圆制造或“Fab”仿真模型通常用于帮助每日运行晶圆生产。它们的主要用途一直专注于测试生产方案,以估算周期时间,向客户报价交付时间,或测试运营策略,如批量调度规则和材料处理系统调度策略。在晶圆价格往往迅速下降之后,Fab Technologies有时会保持一年的需求。基于此,许多半导体制造商将周期时间视为最重要的元素,并将其视为晶片制造中的监测性能测量。模拟建模的显着效益之一是进行灵敏度的能力(“什么IF”)分析,使我们能够在不扰乱实际制造操作的情况下进行实验。本文将专注于并介绍自动加速AP仿真软件从Brooks自动化提供的应用,以提供(“什么”)分析和与FAB利用的循环时间相关的特征曲线。本文将展示模拟如何用作建模工具,以协助生产经理在生产规划中的决策过程,并有效地评估工厂的性能能力。分析将描述不同百分比的工厂装载对循环时间的影响。

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